Su 8 negative photoresist

Manufactured by MicroChem

Sourced in United States

SU-8 is a negative photoresist used in microfabrication processes. It is a chemically amplified epoxy-based photoresist that can be used to create high-aspect-ratio microstructures with excellent chemical and thermal stability.

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SU-8 2050 negative photoresist SU-8 2075 negative photoresist SU-8 2010 negative photoresist SU-8 2002 negative photoresist SU-8 3025 negative photoresist SU-8 100 negative photoresist SU-8 photoresist

18 protocols using su 8 negative photoresist

Microfluidic Channel Design for Circulating Tumor Cell Analysis

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A straight microfluidic channel of 100 μm width and 50 μm height was used, and thus the aspect ratio was defined as 1/2 (AR = height/width). The length of the main channel was 25 mm and the width of the expansion region at the outlet trifurcation was 800 μm for visualization of the flow streams of particles and cells. At the entrance region of the microchannel, micropillars of 50 μm width and 100 μm length were designed with 50 μm spacing to avoid the possible blockage of the microchannel by aggregated particles or CTC clusters. In clinical samples, CTC clusters can be found in approximately 5–20% of the total CTCs [43 (link),44 (link)].
A polydimethylsiloxane (PDMS) microfluidic channel was fabricated using standard soft-lithography techniques with a replica mold, which was fabricated using an SU-8 negative photoresist (MicroChem, Newton, MA, USA) on a silicon wafer. A 10:1 mixture of the PDMS base and curing agent (Sylgard 184, Dow Corning, Midland, MI, USA) was cast over the replica mold, degassed in a vacuum chamber, and baked in an oven at 80 °C for 1 h. The cured PDMS channels were peeled off from the mold and bonded on a glass slide with oxygen plasma (CUTE, Femto Science, Gyeonggi, Korea). To minimize unwanted hydrophobic interactions between polystyrene particles and the channel surface, the PDMS channel was treated with Tween 20 [45 (link)].

Lim H., Back S.M., Hwang M.H., Lee D.H., Choi H, & Nam J. (2019). Sheathless High-Throughput Circulating Tumor Cell Separation Using Viscoelastic non-Newtonian Fluid. Micromachines, 10(7), 462.

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Microvascular Architecture Mimicry via Microfluidics

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As illustrated in Fig. 2 A and B, eight microchannels that contain various sizes of cavities are designed to mimic different MAs. The BNR of the simulated MAs is defined as the largest caliber of the MA body divided by the size of feeding vessels and varies from 12 to 1.5. These MA channels were fabricated with polydimethylsiloxane (PDMS) using standard soft lithography. Each device was fabricated by using a master mold, lithographically patterned with SU-8 negative photoresist (Microchem Corporation) on a 4-inch silicon wafer (Silicon Connection), which was later placed inside a Petri dish. Commercial thermocurable PDMS (Sylgard 184, Dowsil) prepolymer was prepared by mixing the base and curing agent at a 10:1 weight ratio, following which the PDMS prepolymers were degassed under vacuum and cast onto the mold. Thermal cross-linking of PDMS was performed by curing at 80 °C for 2 h. The cured PDMS was cut and peeled off from the channel mold, following which the inlet and outlet access ports were created by using a 1.5-mm-diameter punch. Next, the PDMS channel was bonded with a cover slide under 80 °C for 2 h. Experiments were conducted after plasma pretreatment for 1 min.

Cai S., Li H., Zheng F., Kong F., Dao M., Karniadakis G.E, & Suresh S. (2021). Artificial intelligence velocimetry and microaneurysm-on-a-chip for three-dimensional analysis of blood flow in physiology and disease. Proceedings of the National Academy of Sciences of the United States of America, 118(13), e2100697118.

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Microfluidic Device Fabrication Protocol

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The device pattern was designed in SolidWorks^® (ver. 2012, Dassault Systems S.A.), and fabricated on a three inch silicon wafer (Silicon, Inc., ID) using standard photolithography methods.^{43 –45 (link)} The fabrication process and dimension measurements were conducted in our lab at the Department of Physics and Astronomy and the Nano Systems Fabrication Laboratory at the University of Manitoba, respectively. Briefly, the designed pattern was printed onto a transparent film at 24,000 dpi resolution (Fineline Imaging, Colorado Springs, CO) and replicated onto a silicon wafer with pre-coated SU-8 negative photoresist (MicroChem Corporation, Westborough, MA) using selective ultraviolet exposure of the film. The patterned wafer served as the mold to reproduce polydimethylsiloxane (PDMS) (Sylgard 184, Dow Corning, Manufacturer SKU# 2065622) replicas using standard soft-lithography methods.^{43 –45 (link)} Specifically, the PDMS working solution was prepared by mixing PDMS and its curing agent at the ratio of 10: 1 (w/w), followed by pouring the solution into the mold. The PDMS replica was cut off from the mold after 2h of baking at 80 °C in an oven. The gel inlet, gel well, chemical inlets, and chemical wells were punched out of the PDMS replica, followed by bonding the replica onto a glass slide using an air plasma cleaner (Harrick Plasma, Ithaca, NY).

Ren X., Getschman A.E., Hwang S., Volkman B.F., Klonisch T., Levin D., Zhao M., Santos S., Liu S., Cheng J, & Lin F. (2021). Investigations on T Cell Transmigration in a Human Skin-on-Chip (SoC) Model. Lab on a chip, 21(8), 1527-1539.

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Isolation and Characterization of Circulating Tumor Cells

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3-(4,5-Dimethylthiazol-2-yl)-2,5-diphenyltetrazolium bromide (MTT), 3-aminopropyltriethoxysilane (APTES), Hoechst 33258 solution, dimethyl sulfoxide (DMSO), red blood cell (RBC) lysis buffer, tetraethyl orthosilicate (TEOS) and Triton X-100 were obtained from Sigma (Germany). Absolute ethanol, ammonia solution (25%), ferric chloride hexahydrate (FeCl₃·6H₂O), ferrous chloride tetrahydrate (FeCl₂·4H₂O), and glutaraldehyde were purchased from Merck (Darmstadt, Germany). 0.25% (w/v) trypsin-0.03% (w/v) EDTA solution, antibiotic (penicillin-streptomycin) solution, fetal bovine serum (FBS), phosphate buffered saline (PBS) and RPMI 1640 medium were purchased from Gibco (Invitrogen, Grand Island, NY). FITC anti-human CD326 (EpCAM) antibody, and PE anti-CD45 antibody were purchased from BioLegend (San Diego, CA). The sequence of anti-MUC1 aptamer (5′ NH₂C₆-TTTGCAGTTGATCCTTTGGATACCCTGG 3′) was designed based on the previously report⁴² and synthesized by Bioneer (Daejeon, Republic of Korea). EasySep™ Direct Human CTC Enrichment Kit was purchased from STEMCELL Technologies Inc. (Vancouver, Canada). SU-8 negative photoresist was purchased from Microchem (Sunnyvale, CA, USA). Sylgard 184 was purchased from Dow Corning (Midland, Michigan, USA). All of the aqueous solutions were prepared with double-distilled water.

Kajani A.A., Rafiee L., Samandari M., Mehrgardi M.A., Zarrin B, & Javanmard S.H. (2022). Facile, rapid and efficient isolation of circulating tumor cells using aptamer-targeted magnetic nanoparticles integrated with a microfluidic device. RSC Advances, 12(51), 32834-32843.

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Microfluidic Axotomy Platform for Neurite Injury

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Poly(dimethylsiloxane) (PDMS) (Sylgard 184 Silicon Elastomer, Dow Corning) microfluidic chambers were replica molded against silicon wafers photolithographically patterned with SU-8 negative photoresist (MicroChem)^{11 (link)}. Each silicon wafer contained a first layer of SU-8 to pattern microgrooves 3–4 µm tall and 7.5–8 µm wide. A second layer of SU-8 generated the 85–100 µm high somatodendritic and axonal compartments. All experiments used chambers with 900 µm long microgrooves to separate the somatodendritic and axonal compartments^{11 (link), 16 (link), 24 (link)}. Microfluidic chambers were sterilized using 70% ethanol and placed onto sterile German glass coverslips coated with 500–550 kDa Poly-d-Lysine (BD Biosciences). Approximately ~90,000 cells were plated into the somatodendritic compartment and axons extended into the adjacent axonal compartment after 5–7 days of culture. Axotomy was performed between 11 and 15 days in vitro (DIV) by first removing media from the axonal compartment and storing for future use. The axonal compartment was then aspirated until completely devoid of fluid^{11 (link), 16 (link)}. Stored culture media was returned immediately to the axonal compartment for the duration of the culture time. Microfluidic devices with equivalent viable cell populations were randomly chosen for either axotomy or uninjured control groups.

Nagendran T., Larsen R.S., Bigler R.L., Frost S.B., Philpot B.D., Nudo R.J, & Taylor A.M. (2017). Distal axotomy enhances retrograde presynaptic excitability onto injured pyramidal neurons via trans-synaptic signaling. Nature Communications, 8, 625.

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Fabricating Biomimetic Adipose Tissue Microenvironment

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Poly-dimethylsiloxane (PDMS) was used to frame the microfluidic device to reconstruct a biomimetic adipose tissue microenvironment in vitro. Master molds were first fabricated on silicon substrates by employing photolithography with SU-8 negative photoresist (2025, Microchem). The master molds were silanized with trichloro(1H,1H,2H,2H-perfluorooctyl) silane (448931, Sigma-Aldrich) vapor overnight in vacuum desiccation to facilitate subsequent release of PDMS from the molds. A PDMS precursor (Sylgard-184, Dow Corning) was prepared by mixing a PDMS curing agent with the base (wt:wt = 1:10), and poured onto the molds, and cured overnight in a 60 °C oven. Two separate fully cured PDMS structures with microfluidic channels were fabricated using different molds: one for patterning the circulated AuNRs biosensor barcodes on a glass substrate and the other for forming the on-chip culturing and cytokine detection layer (Figure S1).

Zhu J., He J., Verano M., Brimmo A.T., Glia A., Qasaimeh M.A., Chen P., Aleman J.O, & Chen W. (2018). An Integrated Adipose-Tissue-On-Chip Nanoplasmonic Biosensing Platform for Investigating Obesity-associated Inflammation. Lab on a chip, 18(23), 3550-3560.

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Fabrication of PDMS Microfluidic Devices

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A PDMS microchannel was fabricated using a soft lithography technique with a replica mold, which was fabricated using an SU-8-negative photoresist (MicroChem, Newton, MA, USA) patterned on a silicon wafer. The PDMS base and curing agent (Sylgard 184; Dow Corning, Midland, MI, USA) were mixed at a ratio of 10:1, degassed in a vacuum chamber, and thermally cured in an oven for 1 h at 80 °C. The cured PDMS channels were peeled from the replica mold and bonded to a glass slide with oxygen plasma (CUTE; Femto Science, Seoul, Korea).
The microfluidic device consists of four parallel microchannels with one inlet and two outlets. For a single channel, the width, height, and length of the main straight microchannel were 20 μm, 75 μm, and 3 cm, respectively, while the widths of the outlet trifurcation channels were 150, 100, and 150 μm. To prevent the nonuniform flow behaviors among four parallel microchannels induced by dust or debris in each channel, the microfluidic filter structures were designed in the inlet region (Figure 1d).

Choo S., Lim H., Kim T.E., Park J., Park K.B., Park C., Lim C.S, & Nam J. (2022). A Continuous Microfluidic Concentrator for High-Sensitivity Detection of Bacteria in Water Sources. Micromachines, 13(7), 1093.

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Fabrication of Oocyte Denudation Chip

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The oocyte denudation chip was fabricated using standard PDMS soft lithography techniques. A single layer master was fabricated by spin-coating SU-8 negative photoresist (Microchem, Newton, MA) onto a silicon wafer. The coated wafer was patterned using UV photolithography to define the master for the chip. The height of SU-8 features was measured to be approximately 275 µm using a surface profilometer (Dektak ST System Profilometer, Veeco Instruments Inc., Plainview, NY). The PDMS prepolymer was mixed with the crosslinker (Dow Corning, Midland, MI) at a ratio of 10∶1 (w/w). The mixture was then poured onto the silicon master mold, degassed, and cured at 65°C overnight. The cured PDMS replica was removed from the mold. Inlet and outlet throughholes were punched out for fluidic connection using 2-mm and 10-mm Harris Uni-Core biopsy punchers (Ted Pella, Inc., Redding, CA), respectively. The PDMS slab was treated by oxygen plasma at 300 mmTor oxygen at 50 W for 35 seconds, and then bonded to a 75 mm × 25 mm glass slide to assemble the final oocyte denudation chip.

Weng L., Lee G.Y., Liu J., Kapur R., Toth T.L, & Toner M. (2018). On-chip oocyte denudation from cumulus-oocyte complexes for assisted reproductive therapy. Lab on a chip, 18(24), 3892-3902.

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Fabrication of Chemotactic Brain-on-a-Chip Model

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The chemotactic chip was employed to create AD brain models. Details of the chip design were described in the previous study.^[³⁶ (link)
^] To fabricate a mold of the devices, a SU‐8 negative photoresist (MicroChem, Round Rock, TX), was sequentially patterned using photolithography on a silicon wafer. A mixture of base and curing agent of Sylgard 184 A/B polydimethyl‐siloxane (PDMS) (Dow Corning, Midland, MI) was poured onto the SU‐8 mold to replicate the microstructures. The cured PDMS replica was removed from the mold, and holes were created for fluid reservoirs. Plastic chambers for medium reservoirs were fabricated with a computer‐controlled Zing laser cutter (Epilog Laser, Golden, CO) with a 6 mm thick acrylic plate. The replicated PDMS and plastic layers were glued together using PDMS. The resultant assembly was irreversibly bonded to a customized glass‐bottomed uni‐well plate (MatTek, Ashland, MA) by oxygen plasma treatment (Plasma Etch, Carson City, NV). In prior to the cell culture on the device, each chamber was coated with 1% (v/v) Matrigel matrix (Dow Corning) diluted in DMEM/F‐12 (Life Technologies, Grand Island, NY) for 1 h and washed it with Dulbecco's phosphate‐buffered saline (DPBS, Lonza, Hopkinton, MA) thoroughly.

Kang Y.J., Hyeon S.J., McQuade A., Lim J., Baek S.H., Diep Y.N., Do K.V., Jeon Y., Jo D., Lee C.J., Blurton‐Jones M., Ryu H, & Cho H. (2024). Neurotoxic Microglial Activation via IFNγ‐Induced Nrf2 Reduction Exacerbating Alzheimer's Disease. Advanced Science, 11(20), 2304357.

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Cortisol detection biosensor development

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HRP-labelled cortisol (F-HRP), Hidrocortisone and rabbit anticortisol IgG (capture Ab) were obtained from CosmoBio. The polyclonal goat Ab anti-rabbit-IgG (coating Ab), 3,3′,5,5'Tetramethylbenzidine (TMB), aminopropyltriethoxysilane (APTES), glutaraldehyde (GA), Tween20 and bovine serum albumin (BSA) were obtained from Sigma-Aldrich. Sylgard 184 silicone elastomer (PDMS) was purchased from Dow Corning and the SU-8 negative photoresist from MicroChem. All other chemicals were obtained from Thermo Fisher Scientific. V. Pinto et al. Biosensors and Bioelectronics 90 (2017) 308-313

Pinto V., Sousa P., Catarino S.O., Correia-Neves M, & Minas G. (2017). Microfluidic immunosensor for rapid and highly-sensitive salivary cortisol quantification. Biosensors & bioelectronics, 90.

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