99.999%), copper(II)
chloride (CuCl2, 99.999%), tris(2-pyridylmethyl)amine (TPMA,
98%), [3-(methacryloylamino)propyl]dimethyl-(3-sulfopropyl)-ammonium
hydroxide inner salt (SBMAm, 96%), and sodium chloride (NaCl) were
purchased from Sigma-Aldrich and were used without further purification.
(p-Chloromethyl)phenyl-trichlorosilane) (CMPS, 95%)
was purchased from Gelest, stored inside a nitrogen-filled glovebox,
and used as received. SBVB was synthesized via quaternization of the
tertiary amine precursor with sultone following reported protocol.11 (link) All other chemicals were of reagent grade and
were used without further purification. Deionized (DI) water (Millipore,
18 MΩ·cm) and ultrapure nitrogen were used throughout.
Silicon wafers with the thickness of 0.56 mm were purchased from Latech
Scientific Supply Pte. Ltd. (Singapore).