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Fei scios dual beam system

Manufactured by Thermo Fisher Scientific
Sourced in United States

The FEI Scios Dual Beam system is a versatile scanning electron microscope (SEM) that combines a high-resolution electron beam for imaging with a focused ion beam (FIB) for nanoscale milling and deposition. The system offers high-resolution 3D imaging and analytical capabilities for a wide range of applications.

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3 protocols using fei scios dual beam system

1

Microstructural Analysis of As-Fabricated Parts

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For phase analysis, samples were cut from different locations along the building direction of the as-fabricated parts and were mechanically polished using Struers OP-S suspension containing 20 vol % of H2O2 for 30 min without any chemical etching. The microstructure was characterized in backscattered electron (BSE) mode using an FEI Scios Dual Beam system (Thermo Fisher Scientific Inc., USA) equipped with a concentric backscattered (CBS) detector under 3 kV accelerating voltage, 1.6 nA probe current, and 5.5 mm working distance. For SEM-EDS mapping of as-fabricated parts, the samples prepared for phase analysis were then characterized by using an SEM (JEOL JSM-6610, Japan).
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2

TEM Characterization of Samples

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Samples for transmission electron microscope (TEM) observations were prepared using a FEI Scios Dual Beam system (Thermo Fisher Scientific Inc., USA). TEM characterization was performed on a FEI Tecnai G2 F20 TEM (Thermo Fisher Scientific Inc., USA) operated at an acceleration voltage of 200 kV in both TEM and scanning TEM (STEM) modes.
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3

Raman Spectroscopy and SEM Analysis

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Raman spectroscopy measurements were performed using the Renishaw inVia Micro-Raman Microscope system (Renishaw, Hoffman Estates, IL, USA); an 1800 lines/mm diffraction grating was used. A 633 nm laser was focused to a spot size on the sample through a 100x objective. Laser intensity was 100% and the scan range was 100 cm -1 to 3200 cm -1 . Before each measurement, the system was calibrated with a Si (100) Reference Sample. All the data shown in Figure 1B consist of five-point averages collected from the same sample. Scanning electron microscope (SEM) images were obtained with an FEI Scios Dual Beam System (ThermoFisher Scientific, Waltham, MA, USA) with a 5kV, 0.1nA beam and a 7mm working distance.
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