the uncoated and coated PI films was carried out using a custom designed
test setup32 as shown in
were carefully detached from the 150 mm Si wafer and loaded into a
glovebox (SylaTech, Walzbachtal, Germany). The setup was assembled
under a nitrogen gas atmosphere and a humidity of <20 ppm H2O. The humidity sensors (MSR 145, MSR Electronics GmbH, Seuzach,
Switzerland) were placed in a steel cylinder and sealed with the foil
to be measured. Thus, inside the steel cylinder, there is the humidity
sensor as well as a dry nitrogen gas atmosphere. The sealed steel
cylinders were taken out of the glovebox and placed in a climate chamber
(MKF 115, Binder GmbH, Tuttlingen, Germany). The climate chamber was
set to 85% relative humidity at 23 °C. The humidity sensors sent
the temperature and relative humidity wirelessly every minute to an
external data logger. Attention was given to ensure that the temperature
inside the glovebox and the climate chamber were equal. A total of
nine samples could be tested per run. Measurement was carried out
for 10 days.