Mira 3 stem

Different characterization techniques are used to investigate the chemical and structure composition of IESM as shown in Figs 2–4 and 9. The SEM has been powerful tool for characterizing fundamental physical properties and surface morphology of the samples. The morphology of IESM can be studied by coating sample with platinum (Pt) sputter using Pt 20 mA 120 mode with Scanning electron microscopy (SEM) Jeol JSM-7600F. The damages may occur on the surface of an IESM during fabrication process. For this reason, the fabricated sensor was observed with optical microscope after each step to make sure that, IESM was intact and IDEs were properly fabricated with the DMP-3000 inkjet printer. 2D and 3D nano profile of top electrode and IESM was analyzed with NV-2000 Universal non-contact surface profiler for roughness measurement in phase shifting minterferometry (PSI) mode. The Fourier transform infrared spectroscopy (FTIR) spectra of an IESM were recorded on a Bruker IFS 66 V spectrometer by using the potassium bromide (KBr) pellet, at a resolution 4 cm⁻¹. EDS mapping is performed to confirm the element by element composition of IESM using TESCAN MIRA 3 STEM.

To study the chemical and structural composition of IESM as mentioned in Fig. 2 and 3, various characterization techniques are applied. The detailed morphology analysis of IESM was performed using scanning electron microscopy (SEM JEOL JSM-7600F) by coating the membrane with platinum sputter. The NZ-2000 Universal non-contact surface profiler was used to analyze the 2D and 3D nano-profile of the IESM to study the surface roughness and film thickness in the phase shifting interferometry mode (PSI). TESCAN MIRA 3 STEM was used to perform the EDS mapping of IESM to investigate the detailed elemental composition. The functional groups of the IEMS was analyzed by Fourier transform infrared spectroscopy (FRIR, Thermo fisher Scientific Nicolet 6700 spectrometer). Robust mini linear servo actuator (Model L12-30PT-4 and L12-20F-3) was used to apply the constant pressure on the capacitive and piezoelectric pressure sensor array.

Current-voltage (I-V) and neuromorphic characterization of the device was performed with the KEYSIGHT B2902A source measuring unit. The surface morphology of Ag@AgCl core-shell nanoparticles was analyzed through TESCAN MIRA3 STEM and the core-shell element compositions were analyzed using EDS. The chemical and structural information of the Ag@AgCl core shell was investigated by FTIR using a Bruker IFS 66V spectrometer. The crystal structure of the FeCl₃, Ag, and Ag@AgCl core shell was characterized by XRD diffraction with a tube target of Cu.