Jem 2100f hrp

Observations of the SiN membranes were performed using a field-emission TEM (JEM-2100F (HRP), 200 kV, JEOL, Ltd.). Before the observations, the membranes were immersed in deionized water for a day to remove any salt residues. The areas of the fabricated nanopores were measured using image processing software (ImageJ, National Institutes of Health, Bethesda, MD, USA). The observation process described above was the same as that described in our previous report^{56 (link)}.

Observations of the SiN membranes were performed using a field-emission transmission electron microscope (JEM-2100F (HRP), 200 kV, JEOL, Ltd.). Before the observations, the membranes were immersed in deionized water for a day to remove any salt residues. The areas of the fabricated nanopores were measured using image processing software (ImageJ, National Institutes of Health, Bethesda, MD, USA).
Cross-sectional images of the SiN layers were captured using a scanning transmission electron microscope (HD 2700, 200 kV, Hitachi High-Technologies Corp.). An investigation of the composition ratio of the SiN film was performed by XPS (PHI 5000 VersaProbe II, X-ray: Al Kα, ULVAC-PHI, Inc.).

Cross-sectional images of the Si₃N₄ layers were obtained using a scanning transmission electron microscope (HD 2700, 200 kV, Hitachi High-Technologies Corp.). Observations of the top of the Si₃N₄ membranes and nanopore fabrication were performed using a field-emission transmission electron microscope (JEM-2100F (HRP), 200 kV, JEOL, Ltd.). The electron flux used to fabricate the nanopores was approximately 1 × 10⁸ to 1 × 10⁹ e⁻ nm⁻² s⁻¹, and the irradiation time was approximately 5 seconds.