Focused ion beam scanning electron microscopy (FIB-SEM) images were collected on a FEI Helios
NanoLab G3 UC scanning electron microscopy. The wafers of interest were placed on aluminium SEM stubs using a conductive carbon tape on the back-side of the wafer. For SEM images, the accelerating voltage was set to 2 kV and the current to 0.10 nA and the backscattered electron images were collected with a through-lens-detector to take full advantage of the strong
Z-contrast between LaOCl, the formed polyethylene and the Si(100) background. EDX elemental mapping was performed with a silicon drift detector (SDD)
X-MAX from Oxford Instruments. Prior to the milling of the region of interest with the focused ion beam a 3 µm thick Pt layer was deposited on top of the region of interest. The focus ion beam accelerating voltage was set at 30 kV and the current for both milling and cleaning at 0.43 nA. The milling was performed to create a trench perpendicularly to the surface and roughly at the centre of a spherical cap. After the milling step, the cross-section was cleaned with Ga ions before collecting the backscattered electron images.
Bossers K.W., Mandemaker L.D., Nikolopoulos N., Liu Y., Rohnke M., de Peinder P., Terlingen B.J., Walther F., Dorresteijn J.M., Hartman T, & Weckhuysen B.M. (2022). A Ziegler-type spherical cap model reveals early stage ethylene polymerization growth versus catalyst fragmentation relationships. Nature Communications, 13, 4954.