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2 protocols using s1813 photoresist

1

MWCNT-SU-8 Nanocomposite Biosensor

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Standard multi-walled carbon nanotubes (MWCNTs) with diameter range of 5–20 nm and length 1–10 µm was purchased from Reinste Nano Ventures Pvt. Ltd. (New Delhi, India). An epoxy-based negative photoresist, SU-8 series formulation (cyclopentanone based), was obtained from Micro Chem, Newton, MA, USA. SU-8 is available in several viscosities, SU-2002 being the lowest and SU-2150 being the highest. For our experimentation SU-8 2015 is procured as it suits our viscosity requirements. S1813 photoresist was also procured from Micro Chem, Newton, MA, USA. Phosphate buffered saline tablets (PBS), 1-Ethyl-3-(3-dimethylaminopropyl) carbodiimide (EDC), N-Hydroxysuccinimide (NHS), chloroform, Bovine Serum Albumin (BSA), Myoglobin from equine skeletal muscle and monoclonal antibody myoglobin purchased from Sigma Aldrich, India. Ultra pure DI water (18.2 MΩ·cm) was used throughout.
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2

Fabrication of Microfluidic Devices

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Chemicals and materials were obtained from the following sources and used without further purification: 2'-Deoxyadenosine-5'-monophosphate (Alfa Aesar); Thymidine-5'-monophosphate disodium salt (Alfa Aesar); 2'-Deoxycytidine-5'-monophosphate (Alfa Aesar); 2'-Deoxyguanosine-5'-monophosphate disodium salt hydrate (Alfa Aesar); potassium chloride (1 and 3 m, Sigma-Aldrich); Tris-EDTA (100×, Sigma-Aldrich); Tris-Borate-EDTA (10×, Sigma-Aldrich); silver (Ag) wires (>99%, Sigma-Aldrich); S1813 photoresist (MicroChem); MF319 developer (MicroChem); potassium hydroxide (KOH) pellets (Fisher Scientific); hydrofluoric acid (HF) (Sigma-Aldrich); Fluorolink MD 700 (Solvay); 2-hydroxy-2-methylpropiophenone (Sigma-Aldrich); NOA72 (Norland Products); poly(ethylene glycol) diacrylate (PEGDA) (Mn = 250, Sigma-Aldrich); 2,2-dimethoxy-2-phenylacetophenone (Sigma-Aldrich); Si wafers (P/B, resistivity 5-10 Ωcm, orientation of (100), and 525 ± 25 μm thickness) (WaferPro); polyethylene terephthalate (PET) with 250 μm thickness (Goodfellow); polymethylmethacrylate (PMMA) with a thickness of 250 μm (Goodfellow); polymethylmethacrylate (PMMA) of 1 mm thickness (ePlastics).
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