A LA system (UP213, Electro Scientific Indutries (ESI), Portland, OR, USA) and an ICPMS instrument (
Agilent 7500ce, Agilent Technologies, Tokyo, Japan) were used in this study (Table 2). A pressure vessel with a stainless-steel jacket (HU-50, San-ai Kagaku, Aichi, Japan) was used for the acid digestion of SiC powders and sintered SiC cracked with a hammer. SiC particles were observed by scanning electron microscopy (SEM;
S-4300, Hitachi High Technologies, Tokyo, Japan). For SEM measurements, the surfaces of all the samples were coated with a Pt/Pd alloy by means of an ion sputtering device (
E-1045, Hitachi High Technologies, Tokyo, Japan).
Dynamic light scattering (ELSZ-2000ZS, Otsuka Electronics Co., Osaka, Japan) was used to measure the diameter distribution of LAL-sampled particles. A semiconductor laser with a wavelength of 660 nm was used.
The LAL-sampled particles of sintered SiC and single-crystal SiC were placed on a glass slide by means of a needle, and their chemical compositions were measured by laser Raman microscopy (RAMAN-11, Nanophoton Corporation, Osaka, Japan; laser wavelength, 532 nm). This method enabled us to analyze individual particles.
Machida R., Nishioka R., Fujiwara M, & Furuta N. (2017). Determination of Trace Elements in Sintered and Single-Crystal Silicon Carbide by Laser Ablation in Liquid Inductively Coupled Plasma Mass Spectrometry. Analytical sciences : the international journal of the Japan Society for Analytical Chemistry, 33(4).