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2 protocols using si wafers

1

Fabrication of PS Colloidal Nanoparticles

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Polystyrene (PS) colloidal particles (10% w/w) with diameters of 100 and 500 nm were obtained from the Duke Scientific Corporation in Palo Alto, CA, USA. Anhydrous ethanol, Si wafers, hydrogen peroxide, ammonia, and sodium dodecyl sulfate were purchased from Sigma-Aldrich Co., Ltd., Beijing, China. The Ag (99.99%) target material was purchased from Beijing TIANQI Advanced Materials Co., Ltd., Beijing, China. AFP-L3 ELISA kits, phosphate-buffered saline solution (PBS; 0.01 M, pH = 7.4), and bovine serum albumin (BSA), were purchased from Beijing Dingguo Changsheng Biotechnology Co., Ltd., Beijing, China. 5,5′-Dithiobis (succinimidyl-2-nitrobenzoate) (DSNB) [15 (link)] and ultrapure water were used in the experiment.
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2

Fabrication of Microfluidic Devices

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Chemicals and materials were obtained from the following sources and used without further purification: 2'-Deoxyadenosine-5'-monophosphate (Alfa Aesar); Thymidine-5'-monophosphate disodium salt (Alfa Aesar); 2'-Deoxycytidine-5'-monophosphate (Alfa Aesar); 2'-Deoxyguanosine-5'-monophosphate disodium salt hydrate (Alfa Aesar); potassium chloride (1 and 3 m, Sigma-Aldrich); Tris-EDTA (100×, Sigma-Aldrich); Tris-Borate-EDTA (10×, Sigma-Aldrich); silver (Ag) wires (>99%, Sigma-Aldrich); S1813 photoresist (MicroChem); MF319 developer (MicroChem); potassium hydroxide (KOH) pellets (Fisher Scientific); hydrofluoric acid (HF) (Sigma-Aldrich); Fluorolink MD 700 (Solvay); 2-hydroxy-2-methylpropiophenone (Sigma-Aldrich); NOA72 (Norland Products); poly(ethylene glycol) diacrylate (PEGDA) (Mn = 250, Sigma-Aldrich); 2,2-dimethoxy-2-phenylacetophenone (Sigma-Aldrich); Si wafers (P/B, resistivity 5-10 Ωcm, orientation of (100), and 525 ± 25 μm thickness) (WaferPro); polyethylene terephthalate (PET) with 250 μm thickness (Goodfellow); polymethylmethacrylate (PMMA) with a thickness of 250 μm (Goodfellow); polymethylmethacrylate (PMMA) of 1 mm thickness (ePlastics).
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