Mrd diffractometer

Surface coverage and thickness were measured using peak-force tapping mode in a Bruker Icon AFM using scanasyst AFM tips with a nominal tip radius of ∼2 nm and a spring constant of 0.4 N/m. Raman and PL measurements were performed using a HORIBA LabRAM HR Evolution Raman microscope with laser wavelengths of 532 nm. Raman spectra were collected with 1800 grooves per mm grating, while PL measurements were conducted with 300 grooves per mm grating. The Raman and PL maps were acquired over a 5 × 5 µm² area. X-ray diffraction characterization of MoS₂ films was carried out with a PANalytical MRD diffractometer with a 5-axis cradle. X-rays were generated in a standard Cu anode X-ray tube operated at 40 kV accelerating voltage and 45 mA filament current. Cu K line was filtered by a mirror with 1/4° slit and Ni filter on the primary beam side. On the diffracted beam side, an 0.27° parallel plate collimator with 0.04 rad Soller slits with PIXcell detector in open detector mode was employed. Samples' surface was ~2–4° away from the X-ray incidence plane such that diffraction caused by the (h k i 0) planes, to determine the in-plane epitaxial relation of the film with respect to a substrate, could be measured^{35 (link)}.

A Bruker Icon atomic force microscope was used to measure surface morphology and film thickness. Scanasyst AFM tips with a nominal tip radius of ≈2 nm and spring constant of 0.4 Nm⁻¹ were used in the peak-force tapping mode for the measurements. Photoluminescence (PL) maps were acquired over a 5 × 5 μm² area with a laser wavelength of 532 nm and 300 grooves per mm grating in a WITec apyron Confocal Raman Microscope. A PANalytical MRD diffractometer with a 5-axis cradle was used for in-plane X-ray diffraction characterization of the sulfide films^{70 (link)}. A Cu anode X-ray tube operated at 40 kV accelerating voltage and 45 mA filament current was used as the X-ray source. On the primary beam side, a mirror with ¼° slit and Ni filter were used to filter the Cu Kα line. On the diffracted beam side, an 0.27° parallel plate collimator with 0.04 rad Soller slits with PIXcell detector in open detector mode were employed. To determine the in-plane epitaxial relation of the film with respect to a substrate, sample surface was ≈2–4° away from the X-ray incidence plane.