Summit 11600 ap

The surface morphologies
of Ti₃C₂T_x thin
films were visualized by optical microscopy (Zeiss AXIO Scope), scanning
electron microscopy (SEM) (Nova Nano, FEI), and atomic force microscopy
(AFM) (Bruker, Dimension Icon SPM). A Bruker D8 Advance XRD system
with CuKα radiation (λ = 1.5406 Å) was employed to
obtain the X-ray diffraction (XRD) patterns of Ti₃C₂T_x thin films. A focused ion beam
(FIB) technique (Helios G4, FEI) was used to fabricate the transmission
electron microscopy (TEM) sample. The TEM image was obtained using
a Titan G2 60-300 (FEI), equipped with a spherical aberration corrector
for an imaging system, at an acceleration voltage of 300 kV. Raman
spectra were collected by a Wintec Apyron Raman spectrometer with
a 633 nm laser source excitation. The hydrophilicity of MoS₂ films was demonstrated by testing static contact angles using a
contact angle system (OCA 35, DataPhysics, Filderstadt, Germany).
A VMP3 multichannel electrochemical workstation (Bio-Logic) was used
to measure the frequency-dependent capacitance and phase angle of
the electrolyte. An Agilent B1500A semiconductor device analyzer equipped
with a microprobe station (Summit-11600 AP, Cascade Microtech) was
employed to determine the performances of transistors.

The capacitance curve for the ATO dielectric was measured by a capacitance meter (Agilent E4981A). The electrical performance of p- and n-type TFTs and CMOS inverters were characterized at room temperature in dark using a semiconductor device analyzer (Agilent B1500A) and a microprobe station (Summit-11600 AP, Cascade Microtech). The chemical composition of the Cu₂O/SnO bilayer films was analyzed by x-ray photoelectron spectroscopy (XPS) using an Axis Ultra DLD spectrometer (Kratos Analytical, UK). Raman spectra were analyzed at room temperature at wavenumber range from 100 to 800 cm⁻¹ by LabRAM ARAMIS Raman Microscope (Horiba Scientific) and a 473 nm cobalt laser source was used for excitation. Cross-sectional TEM sample was prepared by a focused ion beam (FIB) from Quanta 3D FEG (FEI). About 500 nm amorphous carbon layer was deposited by a carbon coater (Emitech K950X) as protection layer before performing the cross-sectional sample preparation by FIB. High resolution TEM image of bilayer sample was investigated by a Titan ST (FEI) transmission electron microscope. The UV-Vis transmittance spectra was measured by Evolution 600 UV-Vis Spectrophotometer (Thermo Scientific).