were determined by SEM using a JEOL JSM-6700 microscope (3 kV). The
roughness measurements were obtained using a Nanosurf easy scan AFM,
equipped with a 10 μm tip in noncontact mode with an oscillating
probe. The scan area was 5 μm × 5 μm with 20 nm scan
intervals. XRD was performed on a Bruker D8 Discover LynxEye diffractometer
using primary monochromated Cu Kα1 radiation (λ
= 1.5406 Å, 2θ = 5–66°, 0.05° per step).
XRD patterns were compared with Inorganic Crystal Structure Database
(ICSD) reference patterns for monoclinic VO2 (ICSD 34033).
Optical transmittances were monitored on a Perkin Elmer Lambda 950
UV–vis–NIR spectrophotometer that was equipped with
a homemade heating unit. The thermochromic properties of the films
were measured by recording the transmittance spectra from 2500 to
250 nm as a function of temperature between 20 and 90 °C. The
Scotch tape test20 (link) was used to determine
the adhesion of the films to the substrate. Thin films thicknesses
were determined by the φ SemiLab SE-2000 ellipsometer. XPS was
carried out on thin films using a Thermo Scientific K-α spectrometer
with monochromated Al Kα radiation, a dual beam charge compensation
system, and constant pass energy of 50 eV (spot size, 400 μm).
Spectra were recorded from 0 to1200 eV.