Example 31
ZEP520A (product of Zeon Corporation) was employed for a resist layer. The film thickness of the resist layer (ZEP520A) was measured using an AFM to be 50 nm. In an activating step, the resist layer was irradiated with an electron beam at an irradiation current of 30 pA and an acceleration voltage of 30 kV using a patterning device JSM-6500F (with a beam blanker, raster scanning), product of JEOL Ltd., as an activating device.
After the activating step was performed, a latent pattern image forming step was performed. In the latent pattern image forming step, whole-area UV irradiation was performed in the atmosphere for 15 minutes only with light having a wavelength that is not absorbed by the resist (365 nm) obtained through a filter and using a light source with 0.7 mW/h, a black light SLUV-6, product of AS ONE Corporation, as a latent pattern image forming section. A sample that was not subjected to the UV exposure was also prepared in the same manner.
In a developing step, the resist layer was developed at 13° C. for 60 seconds with a developing solution ZED-N50 (product of Zeon Corporation).