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Ex 200

Manufactured by Physical Electronics
Sourced in Japan

The EX-200 is a laboratory instrument that provides high-resolution surface analysis capabilities. It is designed to perform X-ray photoelectron spectroscopy (XPS) measurements on a wide range of materials. The EX-200 allows for the quantitative and qualitative analysis of the chemical composition and electronic structure of a sample's surface.

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4 protocols using ex 200

1

Fabrication of Organic Thin-Film Transistors

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Figure 1(a) shows a schematic of a fabricated transistor device. We first deposited a 30-nm-thick aluminum (Al) layer on a glass substrate (Corning Eagle XG, Germany) using vacuum deposition (EX-200, ULVAC, Japan). The substrate was then anodized in 1 mM of citric acid to grow an aluminum oxide (AlOx) layer. In the next step, the substrate was immersed in 3 mM of dodecylphosphonic acid (C12H27O3P) for 12 h at 30 °C, followed by rinsing in isopropyl alcohol and drying with nitrogen gas that produced a self-assembled monolayer (SAM) of dodecylphosphonate on the substrate. The fabrication process was followed by a vacuum deposition of a 30-nm-thick layer of pentacene molecules, which was deposited at the rate of 0.2 Å/s. Finally, a 50-nm-thick gold layer was deposited on these substrates through a shadow mask to fabricate source/drain contacts followed by an annealing of the device at 100 °C for 1 h under vacuum. The channel length and width of the transistor device were 40 µm and 500 µm, respectively. We fabricated two devices using sublimated and non-sublimated pentacene molecules under the same fabrication conditions.
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2

Triptycene Film Fabrication via TVE and BC

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Triptycene films were formed by TVE and BC. TVE was carried out using an ULVAC EX200, and the film thickness was monitored using a quartz-crystal microbalance. BC was carried out using a custom-made deposition system in ambient air. The triptycene powder was dissolved in mesitylene (Wako chemicals) to obtain a 0.5 mM solution. The blade was made of glass. All substrates were heated to 50–60 °C with a silicone-rubber heater while depositing the triptycene/mesitylene solution. The blade speed was fixed to between 40 and 50 µm/s. In the present study, the TVE-Trip process required approximately 1 h, including the evacuation and cooling time, while the BC-Trip process required approximately 8.5 or 17 min for substrate areas of 2 × 3 cm2 and 4 × 5 cm2, respectively. After forming triptycene films by TVE and BC processes, all the substrates were annealed at 120 °C for 1 h under vacuum at around 100 Pa.
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3

Fabrication of Interdigitated Electrodes

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Interdigitated electrodes were fabricated on films or mesh substrates via vacuum deposition. The film was a 75 µm thick polyimide (UPILEX‐75S, Ube Industries) or a 1.4 µm thick PET film (Mylar 1.4 CW02, DuPont Teijin Films). The PET film was attached in advance to a polyimide film (1020RM‐S, Okamoto Industries) with an adhesive layer. This adhesive polyimide film served as a supporting substrate to ease the handling of the 1.4 µm PET film during device fabrication. 70 nm gold was deposited on films or mesh substrates through a film mask using EX‐200 (ULVAC). The interdigitated electrode was 1 cm long, and 400 µm wide with 13 fingers. The spacing between adjacent fingers was 400 µm.
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4

FET Fabrication and Characterization

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FET devices were fabricated by photolithography. MoS 2 films on SiO 2 /Si substrates were spin-coated with an AZ P1350 photoresist (Merck Performance Materials), followed by an exposure/development process, resistive thermal evaporation of Au (20 nm)/In (5 nm) electrodes (ULVAC, EX-200) and a liftoff process in acetone. The devices were then annealed at 200 °C under vacuum (∼10 -4 Pa) for 30 min before the transport measurements. To prepare the four-terminal devices for Hall effect measurements, the devices were plasma-etched for 1 min using a Tergeo plasma cleaner (Pie Scientific) at 49 W under Ar and air. For the n + /i/n + patterned doping, an SU-8 3005 photoresist (Kayaku Advanced Materials) was coated only in the middle of the channel using a lithography process. A similar n + /i/n + patterned doping was achieved by combining an AZ P1350 photoresist coating applied only close to the S/D electrodes and water immersion after KOH/benzo-18-crown-6 doping.
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