Galipix3d

An XRD system (Empyrean, PANALYTICAL; Cu–Kα radiation
(1.54 Å), 45 kV and 40 mA) was used for phase and crystallinity
analysis of femtosecond-generated LIPSS created on a metallic Au–Ni
target in ethanol, butanol, hexane, and water. The Z-height adjustment
was done for each sample positioned on a remote-controlled XYZ stage
and observed by a charge-coupled device (CCD) camera. A micronozzle
with a diameter of 300 μm was used to obtain a rectangular slim
beam with a length of 6 mm. In order to reduce noise and avoid defocusing,
a parallel beam X-ray collimator was mounted. To obtain higher resolution
and surface sensitivity, the angle of incidence (ω) was fixed
at 6°. Two-dimensional (2D) micro-XRD was achieved via grazing-incidence
diffraction (GID). The 2D-detector position (GaliPIX^3D,
Malvern PANalytical) was changed from 20° to 100°.

XRD measurements
were performed to investigate the crystal structures of the different
thin films and microelectrodes using an Empyrean X-ray diffractometer
(Malvern Panalytical, U.K.) with a copper radiation source in grazing-incidence
and Bragg–Brentano geometry. For the grazing-incidence scans,
which were performed at an incidence angle of 2 °, a parallel
beam mirror on the incident-beam side and a parallel-plate collimator,
together with a scintillation detector, on the diffracted-beam side
were employed. A focusing mirror on the incident-beam side and a semiconductor
area detector (GaliPix3D, Malvern Panalytical, U.K.) on the diffracted-beam
side were applied for the measurements in Bragg–Brentano geometry.
In order to focus the beam onto individual microelectrodes, a 0.3 mm
slit was used.
Atomic force microscopy (AFM) measurements were
conducted in order to analyze the surface structures of different
LSC samples [Nanoscope V multimode setup (Bruker, USA) operated in
tapping mode].