To promote microcavity infiltration with the protein sample, previously fabricated porous silicon substrates with microcavities were exposed to oxygen plasma at 400 mtorr pressure (@29.6 W RF power) for 60 s (PDC-002 Expanded Plasma Cleaner, Harrick Plasma, Ithaca, NY, USA) hydrophilizing their surfaces. Then, the PYP solution was pipetted on the substrates to fill these cavities. The protein films were left drying for 24 h on the substrates. Finally, the extra volumes of the PYP coatings on the slides were washed mildly using deionized water (MilliQ water, Synergy® UV Water Purification System, Merck-Millipore, Burlington, MA, USA), and the PYP functionalized porous silicon microcavity samples became ready-to-use for the measurements.
Functionalization of Porous Silicon Microcavities for Protein Immobilization
To promote microcavity infiltration with the protein sample, previously fabricated porous silicon substrates with microcavities were exposed to oxygen plasma at 400 mtorr pressure (@29.6 W RF power) for 60 s (PDC-002 Expanded Plasma Cleaner, Harrick Plasma, Ithaca, NY, USA) hydrophilizing their surfaces. Then, the PYP solution was pipetted on the substrates to fill these cavities. The protein films were left drying for 24 h on the substrates. Finally, the extra volumes of the PYP coatings on the slides were washed mildly using deionized water (MilliQ water, Synergy® UV Water Purification System, Merck-Millipore, Burlington, MA, USA), and the PYP functionalized porous silicon microcavity samples became ready-to-use for the measurements.
Variable analysis
- Oxygen plasma exposure pressure (400 mtorr)
- Oxygen plasma exposure power (29.6 W RF power)
- Oxygen plasma exposure duration (60 s)
- Hydrophilicity of porous silicon substrates with microcavities
- PYP solution infiltration into the microcavities
- PYP film formation on the substrates
- Previously fabricated porous silicon substrates with microcavities
- PYP solution preparation process (as described in previous studies)
- Drying duration of PYP films (24 h)
- Washing of extra PYP coatings using deionized water
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