PDMS Etching Process for Site Opening

PDMS etching solution for site opening was prepared by mixing Tetrabutylammonium fluoride solution (TBAF solution, Sigma-Aldrich, USA) in N-methyl-2-pyrrolidinone (NMP, Sigma-Aldrich, USA) by 1:3 ratio. The fabricated sample which was made in Sect. 2.2.4 was immersed into the etching solution and stirred at 70 rpm for 20 min. After etching process, the site-opened electrode was rinsed with deionized water. The fabricated results were shown in Fig. 4.Fig. 4

Top-view of the fabricated electrode and the SEM image of the site-opened electrode after PDMS etching process

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Jeong H., Lee T., Kim J., Jeong H.S., Jun S.B, & Seo J.M. (2024). Fabrication and validation of flexible neural electrodes based on polyimide tape and gold sheet. Biomedical Engineering Letters, 14(2), 267-278.

Publication 2024

NMP

Corresponding Organization :

Other organizations : Seoul National University, Ewha Womans University

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Variable analysis

independent variables

Ratio of Tetrabutylammonium fluoride solution (TBAF solution) to N-methyl-2-pyrrolidinone (NMP)
Stirring speed of the etching solution
Duration of the etching process

dependent variables

Quality of the site-opened electrode after the PDMS etching process

control variables

Fabricated sample mentioned in Section 2.2.4
Rinsing the site-opened electrode with deionized water after the etching process

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