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MEMS-Enabled Vehicle Attitude Control

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Example 13

A vehicle according to this application example includes any of the MEMS devices described above and an attitude control section that performs attitude control based on a detection signal output from the MEMS device.

The vehicle is mounted with the MEMS device in which the rotational displacement of the movable body in the in-plane direction of the major surface is restricted and which can continuously detect acceleration or the like even when an excessive impact is applied, and the attitude control section performing attitude control based on the detection signal output from the MEMS device. Therefore, it is possible to increase the reliability of the vehicle mounted with the MEMS device described above.

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US11867716B2. MEMS device, electronic apparatus, and vehicle (2024-01-09). SEIKO EPSON CORPORATION [JP]. Inventors: Fumiya Ito [JP].

Patent 2024

Acceleration Body Device Signal detection

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