Maintaining Capacitance Stability in MEMS Devices

Example 11

In the MEMS device according to the application example, it is preferable that the abutment portion and the movable body are at the same potential.

According to this application example, the movable body and the abutment portion are at the same potential, so that the fluctuation and loss of a capacitance generated between the movable body and the abutment portion can be suppressed when the both portions come into contact with each other. Hence, when the movable body and the abutment portion come into contact with each other, the measurement of a physical quantity such as acceleration can be continuously performed.

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US11867716B2. MEMS device, electronic apparatus, and vehicle (2024-01-09). SEIKO EPSON CORPORATION [JP]. Inventors: Fumiya Ito [JP].

Patent 2024

Acceleration Body Device Physical

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Variable analysis

independent variables

Abutment portion and movable body being at the same potential

dependent variables

Fluctuation and loss of capacitance generated between the movable body and the abutment portion
Ability to continuously perform measurement of a physical quantity such as acceleration

control variables

Not explicitly mentioned

controls

No positive or negative controls mentioned

Annotations

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