Example 4
Into a 2 L flask equipped with a stirrer, a thermometer and a cooling pipe, 256 g of 25% TMAH aqueous solution, 600 ml of IPA and 4.0 g of water were charged, and then in a dropping funnel, a mixed solution of 19.0 g of methyltrimethoxysilane, 55.4 g of phenyltrimethoxysilane, 43.1 g of tris-(3-trimethoxysilylpropyl)isocyanurate and 85.8 g of 1,4-bis(dimethylmethoxysilyloxy)benzene were prepared. The mixed solution was dropped into the flask at 40° C., stirred at the same temperature for 2 hours, and then neutralized by adding 10% HCl aqueous solution. 400 ml of toluene and 600 ml of water were added to the neutralized solution and the mixture was separated into two phases. Then the aqueous phase was removed. The organic phase was washed three times with 300 ml of water and the obtained organic phase was concentrated under reduced pressure to remove the solvent and adjusted to add PGMEA to have 35 mass % solid concentration.
The polysiloxane thus obtained had Mw of 4,200 and ADR of 900 Å/sec.
