Example 5
Into a 1 L three-necked flask equipped with a stirrer, a thermometer and a cooling pipe, 8 g of 35% HCl aqueous solution, 400 g of PGMEA and 27 g of water were charged, and then a mixed solution of 39.7 g of phenyltrimethoxysilane, 34.1 g of methyltrimethoxysilane, 30.8 g of tris-(3-trimethoxysilylpropyl) isocyanurate and 0.3 g of trimethoxysilane was prepared. The mixed solution was dropped into said flask at 10° C. and stirred at the same temperature for 3 hours. Then, 300 g of propyl acetate was added, and the mixture was separated into an oil layer and an aqueous layer with a separating funnel. In order to further remove the sodium remaining in the oil layer after separation, the layer was washed four times with 200 g of water, and it was confirmed that the pH of the waste water tank was 4 to 5. The obtained organic layer was concentrated under reduced pressure to remove the solvent and adjusted to a PGMEA solution.
The polysiloxane thus obtained had Mw of 18,000 and ADR of 900 Å/sec.
