Fabrication of Microfluidic Devices
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Corresponding Organization : Shanghai University of Engineering Science
Variable analysis
- Plasma treatment duration (1 min)
- Successful bonding of PDMS mold and glass slide
- Cleaning procedure for glass slides (boiling 7× cleaning solution for 1.5 h, rinsing with purified water, drying with nitrogen gas)
- Photolithographic patterning of photoresist on glass surface
- HF-etching of patterned glass slide to form a model glass slide
- PDMS degassing and curing (degassed under vacuum for at least 1 h, poured onto model glass slide and cured at 70 °C for 3 h)
- Punching of inlet and outlet ports in PDMS mold
- Annealing of bonded PDMS mold and glass slide (108 °C for 1 min)
- PDMS well setup fabrication (placing a PDMS film with a 6 mm diameter hole in the middle)
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