Observations of the SiN membranes were performed using a field-emission TEM (JEM-2100F (HRP), 200 kV, JEOL, Ltd.). Before the observations, the membranes were immersed in deionized water for a day to remove any salt residues. The areas of the fabricated nanopores were measured using image processing software (ImageJ, National Institutes of Health, Bethesda, MD, USA). The observation process described above was the same as that described in our previous report56 (link).
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